Granted Patent
Utility
US 5,580,700 · App. 08/460,611
Metal ion reduction in bottom anti-reflective coatings for use in semiconductor device formation
Inventor:
M. Dalil Rahman
Patented Case
View Patent ↗
Granted: Dec 3, 1996
Filed: Jun 2, 1995
Inventor
M. Dalil Rahman
Assignee (at issue)
Hoechst Celanese Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.