Granted Patent
Utility
US 5,582,939 · App. 08/500,481
Method for fabricating and using defect-free phase shifting masks
Inventor:
Christophe Pierrat
Patented Case
View Patent ↗
Granted: Dec 10, 1996
Filed: Jul 10, 1995
Inventor
Christophe Pierrat
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.