IP Library Granted Patent US 5,585,563
Granted Patent Utility
US 5,585,563 · App. 08/094,664

Non-contact thickness measurement using UTG

Inventor: Hoa T. Bui
Patented Case View Patent ↗
Granted: Dec 17, 1996 Filed: Jul 8, 1993
Inventor
Hoa T. Bui

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Quick Facts
Patent No.
US 5,585,563
App. No.
08/094,664
Filed
1993-07-08
Granted
1996-12-17
Kind
A