Granted Patent
Utility
US 5,587,019 · App. 08/047,552
Apparatus for use in epitaxial crystal growth
Inventor:
Koji Fujie
Patented Case
View Patent ↗
Granted: Dec 24, 1996
Filed: Feb 23, 1993
Inventor
Koji Fujie
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.