Granted Patent
Utility
US 5,587,039 · App. 08/304,719
Plasma etch equipment
Inventors:
Siamak Salimian, Michelangelo Delfino, Bu-Chin Chung
Patented Case
View Patent ↗
Granted: Dec 24, 1996
Filed: Sep 12, 1994
Inventors
Siamak Salimian
Michelangelo Delfino
Bu-Chin Chung
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.