Granted Patent
Utility
US 5,589,005 · App. 08/232,266
System for supplying ultrapure water and method of washing substrate, and system for producing ultrapure water and method of producing ultrapure water
Inventor:
Tadahiro Ohmi
Patented Case
View Patent ↗
Granted: Dec 31, 1996
Filed: May 31, 1994
Inventor
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.