Granted Patent
Utility
US 5,589,693 · App. 08/475,110
Substrates and methods for gas phase deposition of semiconductors and other materials
Inventor:
Tien-Heng Chiu
Patented Case
View Patent ↗
Granted: Dec 31, 1996
Filed: Jun 7, 1995
Inventor
Tien-Heng Chiu
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.