Granted Patent
Utility
US 5,589,810 · App. 08/210,422
Semiconductor pressure sensor and related methodology with polysilicon diaphragm and single-crystal gage elements
Inventor:
Clifford D. Fung
Patented Case
View Patent ↗
Granted: Dec 31, 1996
Filed: Mar 18, 1994
Inventor
Clifford D. Fung
Assignee (at issue)
Fox Boro Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.