Granted Patent
Utility
US 5,591,663 · App. 08/388,502
Method of manufacturing ferroelectric capacitor with a hydrogen heat treatment
Inventors:
Toru Nasu, Atsuo Inoue, Yoshihisa Nagano, Akihiro Matsuda, Koji Arita
Patented Case
View Patent ↗
Granted: Jan 7, 1997
Filed: Feb 14, 1995
Inventors
Toru Nasu
Atsuo Inoue
Yoshihisa Nagano
Akihiro Matsuda
Koji Arita
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.