Granted Patent
Utility
US 5,592,295 · App. 08/436,840
Apparatus and method for semiconductor wafer edge inspection
Inventors:
Leslie George Stanton, Kenneth Krause
Patented Case
View Patent ↗
Granted: Jan 7, 1997
Filed: May 8, 1995
Inventors
Leslie George Stanton
Kenneth Krause
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.