Granted Patent
Utility
US 5,593,495 · App. 08/435,135
Method for manufacturing thin film of composite metal-oxide dielectric
Inventors:
Yoshiyuki Masuda, Ryusuke Kita, Hisako Arai, Noboru Ohtani, Masayoshi Koba
Patented Case
View Patent ↗
Granted: Jan 14, 1997
Filed: May 5, 1995
Inventors
Yoshiyuki Masuda
Ryusuke Kita
Hisako Arai
Noboru Ohtani
Masayoshi Koba
Assignee (at issue)
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.