IP Library › Granted Patent US 5,593,507
Granted Patent Utility
US 5,593,507 · App. 08/355,312

Cleaning method and cleaning apparatus

Inventors: Minoru Inada, Yasutaka Imajo, Masahide Uchino
Patented Case View Patent ↗
Granted: Jan 14, 1997 Filed: Dec 12, 1994
Inventors
Minoru Inada
Yasutaka Imajo
Masahide Uchino
Assignees (at issue)
Kabushiki Kaisha Toshiba
Japan Field Co., Ltd.

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Quick Facts
Patent No.
US 5,593,507
App. No.
08/355,312
Filed
1994-12-12
Granted
1997-01-14
Kind
A