IP Library Granted Patent US 5,595,529
Granted Patent Utility
US 5,595,529 · App. 08/218,611

Dual column abrading machine

Inventors: Joseph V. Cesna, Lawrence O. Day
Patented Case View Patent ↗
Granted: Jan 21, 1997 Filed: Mar 28, 1994
Inventors
Joseph V. Cesna
Lawrence O. Day
Assignee (at issue)
SPEEDFAM CO., LTD.

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Quick Facts
Patent No.
US 5,595,529
App. No.
08/218,611
Filed
1994-03-28
Granted
1997-01-21
Kind
A