Granted Patent
Utility
US 5,596,218 · App. 08/138,906
Hot carrier-hard gate oxides by nitrogen implantation before gate oxidation
Inventors:
Hamid Soleimani, Brian S. Doyle, Ara Philipossian
Patented Case
View Patent ↗
Granted: Jan 21, 1997
Filed: Oct 18, 1993
Inventors
Hamid Soleimani
Brian S. Doyle
Ara Philipossian
Assignee (at issue)
Digital Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.