IP Library › Granted Patent US 5,597,438
Granted Patent Utility
US 5,597,438 · App. 08/527,909

Etch chamber having three independently controlled electrodes

Inventors: Virinder Grewal, Volker B. Laux
Patented Case View Patent ↗
Granted: Jan 28, 1997 Filed: Sep 14, 1995
Inventors
Virinder Grewal
Volker B. Laux
Assignee (at issue)
Siemens Aktiengesellschaft

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Quick Facts
Patent No.
US 5,597,438
App. No.
08/527,909
Filed
1995-09-14
Granted
1997-01-28
Kind
A