Granted Patent
Utility
US 5,597,747 · App. 08/572,809
Method of making inverted thin film transistor using backsick exposure and negative photoresist
Inventor:
Mei-Soong Chen
Patented Case
View Patent ↗
Granted: Jan 28, 1997
Filed: Dec 15, 1995
Inventor
Mei-Soong Chen
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.