Granted Patent
Utility
US 5,599,424 · App. 08/571,732
Method of manufacturing semiconductor devices
Inventors:
Shoji Matsumoto, Yoshihisa Nagano, Yasuhiro Shimada, Yasufumi Izutsu
Patented Case
View Patent ↗
Granted: Feb 4, 1997
Filed: Dec 13, 1995
Inventors
Shoji Matsumoto
Yoshihisa Nagano
Yasuhiro Shimada
Yasufumi Izutsu
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.