Granted Patent
Utility
US 5,599,425 · App. 08/384,087
Predecomposition of organic chlorides for silicon processing
Inventors:
Andre Lagendijk, Damon K. DeBusk
Patented Case
View Patent ↗
Granted: Feb 4, 1997
Filed: Feb 6, 1995
Inventors
Andre Lagendijk
Damon K. DeBusk
Assignees (at issue)
Air Products and Chemicals, Inc.
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.