Granted Patent
Utility
US 5,599,739 · App. 08/366,867
Barrier layer treatments for tungsten plug
Inventors:
Sailesh Mansinh Merchant, Arun K. Nanda, Pradip K. Roy
Patented Case
View Patent ↗
Granted: Feb 4, 1997
Filed: Dec 30, 1994
Inventors
Sailesh Mansinh Merchant
Arun K. Nanda
Pradip K. Roy
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.