Granted Patent
Utility
US 5,600,142 · App. 08/451,842
Measurement of vaporized hydrogen peroxide
Inventors:
Rian Van Den Berg, Mark S. Zetter, Keith L. Miller, Terry R. Todd
Patented Case
View Patent ↗
Granted: Feb 4, 1997
Filed: May 26, 1995
Inventors
Rian Van Den Berg
Mark S. Zetter
Keith L. Miller
Terry R. Todd
Assignee (at issue)
UOP LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.