Granted Patent
Utility
US 5,600,439 · App. 08/429,967
Self-calibration system and method for determining the adequacy of an interferometer angle and surface curvatures in an inspection system for determining disparity between two surfaces
Inventors:
Andrei Csipkes, John Mark Palmquist
Patented Case
View Patent ↗
Granted: Feb 4, 1997
Filed: Apr 27, 1995
Inventors
Andrei Csipkes
John Mark Palmquist
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.