IP Library Granted Patent US 5,601,484
Granted Patent Utility
US 5,601,484 · App. 08/406,976

Device for transporting wafer magazines

Inventors: Erich Adler, Marlies Mages
Patented Case View Patent ↗
Granted: Feb 11, 1997 Filed: Apr 3, 1995
Inventors
Erich Adler
Marlies Mages
Assignee (at issue)
JENOPTIK GmbH

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Quick Facts
Patent No.
US 5,601,484
App. No.
08/406,976
Filed
1995-04-03
Granted
1997-02-11
Kind
A