Granted Patent
Utility
US 5,602,047 · App. 08/663,441
Process for polysilicon thin film transistors using backside irradiation and plasma doping
Inventors:
Hsiung-Kuang Tsai, Lee-Tyng Chen
Patented Case
View Patent ↗
Granted: Feb 11, 1997
Filed: Jun 13, 1996
Inventors
Hsiung-Kuang Tsai
Lee-Tyng Chen
Assignee (at issue)
Industrial Technology Research Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.