Granted Patent
Utility
US 5,603,772 · App. 08/514,242
Furnace equipped with independently controllable heater elements for uniformly heating semiconductor wafers
Inventor:
Shigeaki Ide
Patented Case
View Patent ↗
Granted: Feb 18, 1997
Filed: Aug 11, 1995
Inventor
Shigeaki Ide
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.