Granted Patent
Utility
US 5,604,149 · App. 08/403,142
Method of and device for isolating active areas of a semiconducor substrate by quasi-plane shallow trenches
Inventors:
Maryse Paoli, Pierre Brouquet, Michel Haond
Patented Case
View Patent ↗
Granted: Feb 18, 1997
Filed: Mar 13, 1995
Inventors
Maryse Paoli
Pierre Brouquet
Michel Haond
Assignee (at issue)
FRANCE TELECOM
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.