Granted Patent
Utility
US 5,605,487 · App. 08/242,560
Semiconductor wafer polishing appartus and method
Inventors:
Harold J. Hileman, Robert J. Walsh, Thomas A. Walsh
Patented Case
View Patent ↗
Granted: Feb 25, 1997
Filed: May 13, 1994
Inventors
Harold J. Hileman
Robert J. Walsh
Thomas A. Walsh
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.