IP Library Granted Patent US 5,609,798
Granted Patent Utility
US 5,609,798 · App. 08/475,351

High output PSL aerosol generator

Inventors: Benjamin Y. H. Liu, James J. Sun
Patented Case View Patent ↗
Granted: Mar 11, 1997 Filed: Jun 7, 1995
Inventors
Benjamin Y. H. Liu
James J. Sun
Assignee (at issue)
MSP CORPORATION

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Quick Facts
Patent No.
US 5,609,798
App. No.
08/475,351
Filed
1995-06-07
Granted
1997-03-11
Kind
A