Granted Patent
Utility
US 5,610,102 · App. 08/152,780
Method for co-registering semiconductor wafers undergoing work in one or more blind process modules
Inventors:
George J. Gardopee, Paul J. Clapis, Joseph P. Prusak, Sherman K. Poultney
Patented Case
View Patent ↗
Granted: Mar 11, 1997
Filed: Nov 15, 1993
Inventors
George J. Gardopee
Paul J. Clapis
Joseph P. Prusak
Sherman K. Poultney
Assignee (at issue)
Integrated Process Equipment Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.