Granted Patent
Utility
US 5,612,558 · App. 08/558,164
Hemispherical grained silicon on refractory metal nitride
Inventor:
Steven T. Harshfield
Patented Case
View Patent ↗
Granted: Mar 18, 1997
Filed: Nov 15, 1995
Inventor
Steven T. Harshfield
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.