Granted Patent
Utility
US 5,614,728 · App. 08/158,825
Thin film transistor and fabrication method thereof
Inventor:
Masahiko Akiyama
Patented Case
View Patent ↗
Granted: Mar 25, 1997
Filed: Nov 26, 1993
Inventor
Masahiko Akiyama
Assignee (at issue)
Kabushiki Kaisha Toshiba
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.