Granted Patent
Utility
US 5,618,397 · App. 08/423,233
Silicide targets for sputtering
Inventors:
Osamu Kano, Yasuhiro Yamakoshi, Junichi Anan, Koichi Yasui
Patented Case
View Patent ↗
Granted: Apr 8, 1997
Filed: Apr 17, 1995
Inventors
Osamu Kano
Yasuhiro Yamakoshi
Junichi Anan
Koichi Yasui
Assignee (at issue)
Japan Energy Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.