Granted Patent
Utility
US 5,620,558 · App. 08/219,686
Etching of copper-containing devices
Inventors:
Karrie Hanson, Barry Miller, Barbara J. Sapjeta, Akshay V. Shah, Ken Takahashi
Patented Case
View Patent ↗
Granted: Apr 15, 1997
Filed: Mar 28, 1994
Inventors
Karrie Hanson
Barry Miller
Barbara J. Sapjeta
Akshay V. Shah
Ken Takahashi
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.