Granted Patent
Utility
US 5,620,573 · App. 08/431,355
Reduced stress tungsten deposition
Inventors:
Charles W. Jurgensen, Ratnaji R. Kola, Gabriel L. Miller, Henry I. Smith, Eric R. Wagner
Patented Case
View Patent ↗
Granted: Apr 15, 1997
Filed: Apr 28, 1995
Inventors
Charles W. Jurgensen
Ratnaji R. Kola
Gabriel L. Miller
Henry I. Smith
Eric R. Wagner
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.