Granted Patent
Utility
US 5,620,909 · App. 08/566,766
Method of depositing thin passivating film on microminiature semiconductor devices
Inventors:
Jenshan Lin, James Robert Lothian, Fan Ren
Patented Case
View Patent ↗
Granted: Apr 15, 1997
Filed: Dec 4, 1995
Inventors
Jenshan Lin
James Robert Lothian
Fan Ren
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.