Granted Patent
Utility
US 5,624,864 · App. 08/284,984
Semiconductor device having capacitor and manufacturing method thereof
Inventors:
Koji Arita, Eiji Fujii, Yasuhiro Shimada, Yasuhiro Uemoto, Toru Nasu, Akihiro Matsuda, Yoshihisa Nagano, Atsuo Inoue, Taketoshi Matsuura, Tatsuo Otsuki
Patented Case
View Patent ↗
Granted: Apr 29, 1997
Filed: Aug 4, 1994
Inventors
Koji Arita
Eiji Fujii
Yasuhiro Shimada
Yasuhiro Uemoto
Toru Nasu
Akihiro Matsuda
Yoshihisa Nagano
Atsuo Inoue
Taketoshi Matsuura
Tatsuo Otsuki
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.