Granted Patent
Utility
US 5,625,249 · App. 08/277,792
Megasonic cleaning system
Inventor:
Robert W. Grant
Patented Case
View Patent ↗
Granted: Apr 29, 1997
Filed: Jul 20, 1994
Inventor
Robert W. Grant
Assignee (at issue)
Submicron Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.