Granted Patent
Utility
US 5,629,113 · App. 08/447,781
Photomask used by photolithography and a process of producing same
Inventor:
Hisashi Watanabe
Patented Case
View Patent ↗
Granted: May 13, 1997
Filed: May 23, 1995
Inventor
Hisashi Watanabe
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.