Granted Patent
Utility
US 5,629,528 · App. 08/585,626
Charged particle beam system having beam-defining slit formed by rotating cyclinders
Inventors:
Jonathan A. Jost, Leo V. Klos, Michael E. Mack
Patented Case
View Patent ↗
Granted: May 13, 1997
Filed: Jan 16, 1996
Inventors
Jonathan A. Jost
Leo V. Klos
Michael E. Mack
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.