Granted Patent
Utility
US 5,631,428 · App. 08/561,854
Capacitive semiconductor pressure sensor
Inventors:
Ralf Catanescu, Thomas Scheiter, Christofer Hierold
Patented Case
View Patent ↗
Granted: May 20, 1997
Filed: Nov 22, 1995
Inventors
Ralf Catanescu
Thomas Scheiter
Christofer Hierold
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.