Granted Patent
Utility
US 5,633,103 · App. 08/500,729
Self-aligned alignment marks for phase-shifting masks
Inventors:
John J. DeMarco, Christophe Pierrat
Patented Case
View Patent ↗
Granted: May 27, 1997
Filed: Jul 11, 1995
Inventors
John J. DeMarco
Christophe Pierrat
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.