IP Library Granted Patent US 5,633,209
Granted Patent Utility
US 5,633,209 · App. 08/474,448

Method of forming a circuit membrane with a polysilicon film

Inventor: Glenn J. Leedy
Patented Case View Patent ↗
Granted: May 27, 1997 Filed: Jun 7, 1995
Inventor
Glenn J. Leedy
Assignee (at issue)
Elm Technology Corp.

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Quick Facts
Patent No.
US 5,633,209
App. No.
08/474,448
Filed
1995-06-07
Granted
1997-05-27
Kind
A