Granted Patent
Utility
US 5,633,712 · App. 08/520,198
Method and apparatus for determining the thickness and index of refraction of a film using low coherence reflectometry and a reference surfaces
Inventors:
Shalini Venkatesh, Wayne V. Sorin, Brian L. Heffner
Patented Case
View Patent ↗
Granted: May 27, 1997
Filed: Aug 28, 1995
Inventors
Shalini Venkatesh
Wayne V. Sorin
Brian L. Heffner
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.