Granted Patent
Utility
US 5,636,002 · App. 08/550,879
Auxiliary mask features for enhancing the resolution of photolithography
Inventor:
Joseph Garofalo
Patented Case
View Patent ↗
Granted: Jun 3, 1997
Filed: Oct 31, 1995
Inventor
Joseph Garofalo
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.