Granted Patent
Utility
US 5,637,185 · App. 08/413,487
Systems for performing chemical mechanical planarization and process for conducting same
Inventors:
Shyam P. Murarka, Ronald J. Gutmann, David J. Duquette, Joseph M. Steigerwald
Patented Case
View Patent ↗
Granted: Jun 10, 1997
Filed: Mar 30, 1995
Inventors
Shyam P. Murarka
Ronald J. Gutmann
David J. Duquette
Joseph M. Steigerwald
Assignee (at issue)
Rensselaer Polytechnic Institute
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.