Granted Patent
Utility
US 5,637,879 · App. 08/618,599
Focused ion beam column with electrically variable blanking aperture
Inventor:
Bruno W. Schueler
Patented Case
View Patent ↗
Granted: Jun 10, 1997
Filed: Mar 20, 1996
Inventor
Bruno W. Schueler
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.