Granted Patent
Utility
US 5,640,133 · App. 08/494,024
Capacitance based tunable micromechanical resonators
Inventors:
Noel C. MacDonald, Fred M. Bertsch, Kevin A. Shaw, Scott G. Adams
Patented Case
View Patent ↗
Granted: Jun 17, 1997
Filed: Jun 23, 1995
Inventors
Noel C. MacDonald
Fred M. Bertsch
Kevin A. Shaw
Scott G. Adams
Assignee (at issue)
Cornell Research Foundation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.