Granted Patent
Utility
US 5,641,353 · App. 08/565,592
Low hydrogen-content silicon crystal with few micro-defects caused from annealing
Inventors:
Akito Hara, Masaaki Koizuka
Patented Case
View Patent ↗
Granted: Jun 24, 1997
Filed: Nov 30, 1995
Inventors
Akito Hara
Masaaki Koizuka
Assignee (at issue)
Fujitsu Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.