Granted Patent
Utility
US 5,641,609 · App. 08/339,732
Method for manufacturing pattern layer having different minimum feature sizes
Inventor:
Shozo Nishimoto
Patented Case
View Patent ↗
Granted: Jun 24, 1997
Filed: Nov 14, 1994
Inventor
Shozo Nishimoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.