Granted Patent
Utility
US 5,642,196 · App. 08/520,199
Method and apparatus for measuring the thickness of a film using low coherence reflectometry
Inventors:
Ronald V. Alves, Wayne V. Sorin, Steven A. Newton
Patented Case
View Patent ↗
Granted: Jun 24, 1997
Filed: Aug 28, 1995
Inventors
Ronald V. Alves
Wayne V. Sorin
Steven A. Newton
Assignee (at issue)
Hewlett-Packard Company, L.P.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.