IP Library › Granted Patent US 5,643,638
Granted Patent Utility
US 5,643,638 · App. 08/571,476

Plasma CVD method of producing a gradient layer

Inventors: Jurgen Otto, Johannes Segner, Volker Paquet
Patented Case View Patent ↗
Granted: Jul 1, 1997 Filed: Dec 13, 1995
Inventors
Jurgen Otto
Johannes Segner
Volker Paquet
Assignee (at issue)
Schott Glaswerke

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Quick Facts
Patent No.
US 5,643,638
App. No.
08/571,476
Filed
1995-12-13
Granted
1997-07-01
Kind
A